PROCESS AND SYSTEM FOR DESIGNING A PHOTOLITHOGRAPHY MASK AND A LIGHT SOURCE

摘要

A method for designing a photolithography mask and a light source may include designing an initial photolithography mask and an initial light source using an initial target pattern corresponding to a desired target pattern in a resist layer. The method may also include designing a new target pattern and designing a new photolithography mask and/or a new light source using the new target pattern.