发明名称 |
METHOD AND APPARATUS FOR ADJUSTING RADIATION SPOT SIZE |
摘要 |
An apparatus can include a first beam cropper configured to crop a portion of a radiation pulse having a first spot size to form an intermediate cropped radiation pulse having an intermediate cropped spot with an intermediate cropped spot size less than the first spot size; and a second beam cropper configured to crop the intermediate cropped spot to form a second cropped radiation pulse having a second cropped spot with a second cropped spot size less the intermediate cropped spot size.
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申请公布号 |
US2013161510(A1) |
申请公布日期 |
2013.06.27 |
申请号 |
US201113336992 |
申请日期 |
2011.12.23 |
申请人 |
O'CONNOR CIARAN JOHN PATRICK;HILLIARD SHANE;SUMMERFIELD LEIF;ELECTRO SCIENTIFIC INDUSTRIES, INC. |
发明人 |
O'CONNOR CIARAN JOHN PATRICK;HILLIARD SHANE;SUMMERFIELD LEIF |
分类号 |
G02B5/00;B01J19/08;B01J19/12;H01J49/04 |
主分类号 |
G02B5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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