发明名称 |
MASS FLOW CONTROLLER WITH ENHANCED OPERATING RANGE |
摘要 |
<p>A mass flow controller among other embodiments and method is described. The mass flow controller including a thermal mass flow sensor including at least two sensing elements coupled to a sensor tube of the mass flow controller, the thermal mass flow sensor being designed to provide a first signal indicative of flow of a gas within a first flow-rate-range and a second signal indicative of flow of the gas within a second flow-rate-range; and a control portion figured to control a valve position of the mass flow controller responsive to the first signal when the flow of the gas is within the first flow-rate-range and control the valve position of the mass flow controller responsive to the second signal when the flow of the gas is within a second flow-rate-range.</p> |
申请公布号 |
KR20130070567(A) |
申请公布日期 |
2013.06.27 |
申请号 |
KR20127026574 |
申请日期 |
2011.04.08 |
申请人 |
HITACHI METALS, LTD. |
发明人 |
ZOLOCK J. MICHAEL;SMIRNOV V. ALEXEI |
分类号 |
G01F1/696;G01F7/00;G05D7/06 |
主分类号 |
G01F1/696 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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