| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a carrier-supported organometallic compound for vapor-phase growth, capable of stably supplying an organometallic compound at a constant concentration for a long period without depending on the supplying device, to provide a method of producing the same, and to provide a carrier-supported organometallic compound filling device filled with the compound. <P>SOLUTION: A carrier-supported organometallic compound for vapor phase growth is produced by supporting an organometallic compound for vapor phase growth on a carrier being solid at an ordinary temperature and inert to the organometallic compound, and then crushing the obtained carrier-supported organometallic compound. The carrier-supported organometallic compound does not contain a carrier-supported organometallic compound having a particle diameter of <0.84 mm. <P>COPYRIGHT: (C)2013,JPO&INPIT |
