发明名称 THIN FILM TRANSISTOR AND FABRICATING METHOD
摘要 A thin-film transistor comprises a semiconductor panel, a dielectric layer, a semiconductor film layer, a conduct layer, a source and a drain. The semiconductor panel comprises a base, an intra-dielectric layer, at least one metal wire layer and at least one via layer. The dielectric layer is stacked on the semiconductor panel. The semiconductor film layer is stacked on the dielectric layer. The conduct layer is formed on the semiconductor film layer. The source is formed on the via of the vias that is adjacent to and connects to the gate via. The drain is formed on another via of the vias that is adjacent to and connects to the gate via. A fabricating method for a thin-film transistor with metal-gates and nano-wires is also disclosed.
申请公布号 US2013161755(A1) 申请公布日期 2013.06.27
申请号 US201213451390 申请日期 2012.04.19
申请人 CHEN MIN-CHENG;LIN CHANG-HSIEN;LIN CHIA-YI;LAI TUNG-YEN;HO CHIA-HUA;NATIONAL APPLIED RESEARCH LABORATORIES 发明人 CHEN MIN-CHENG;LIN CHANG-HSIEN;LIN CHIA-YI;LAI TUNG-YEN;HO CHIA-HUA
分类号 H01L27/092;B82Y99/00;H01L21/336 主分类号 H01L27/092
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