| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus and method for recovering a desired gas, such as xenon difluoride, xenon, argon, helium and neon, from effluent of a chemical process reactor. <P>SOLUTION: The apparatus comprises: a chemical process reactor provided with one or more lines for introducing two or more separate gas compositions; at least one inlet for introducing the separate gas compositions into the chemical process reactor; an effluent line from the chemical process reactor; a check valve in the effluent line; a recovery line capable of removing a desired gas from the effluent line; an automatic valve in the recovery line; a process controller capable of controlling introduction of two or more gas compositions in sequence into the chemical process reactor and capable of controlling operation of the automatic valve in the recovery line so that the automatic valve is open during at least a portion of the time when the desired gas is present in the effluent line as a part of a gas composition; and a compressor in the recovery line. <P>COPYRIGHT: (C)2013,JPO&INPIT |
