METHOD FOR PROTECTING THE SURFACE OF AN OPTICAL COMPONENT AND DEVICE FOR PROCESSING WORK PIECES

摘要

The invention relates to a method for protecting the surface of an optical component, wherein an object (8) from which gaseous, liquid or solid substances can be released, in particular a work piece (8) to be processed, is provided in an evacuated vacuum chamber (2) and an optical device is used to observe and/or process the object (8). An optical component (10, 28, 40) of the optical device, having a surface (12, 29, 48) that faces the object and is accessible for the gaseous, liquid or solid substances released from the object (8), is positioned in an optical path (9, 39) of the optical device that extends to the object (8). The surface (12, 29, 48) is protected from the released substances, wherein a gas flow directed in the direction of the object (8) is generated between the surface (12, 29, 48) and the object (8) in the optical path (9, 39). The invention further relates to a device for processing a work piece.