NEUTRON SENSITIVE COATING AND METHOD FOR FORMING SAME

摘要

The present invention relates to a neutron sensitive coating and a method for forming same. The method for forming a neutron sensitive coating mainly comprises: feeding a first sensitive film precursor into a reaction chamber, so that molecules of the first sensitive film precursor are adsorbed to the surface of a substrate, thereby forming a layer of molecular film consisting of the precursor molecules. After removing the redundant precursors from the reaction chamber, another sensitive film precursor different from the first sensitive film precursor is fed into the reaction chamber, so that a chemical reaction occurs between the another sensitive film precursor and the molecular film formed on the surface of the substrate. After that, the redundant precursors in the reaction chamber are removed. If there are other sensitive film precursors to be fed in, these sensitive film precursors are sequentially fed in for reaction, and the redundant precursors are removed. The above steps of feeding in the precursor and removing the redundant precursors are repeatedly performed till a coating that contains neutron sensitive nuclide and reaches a desired thickness is formed.