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发明名称
Substrate processing apparatus
摘要
申请公布号
KR20130003728(U)
申请公布日期
2013.06.26
申请号
KR20110011079U
申请日期
2011.12.14
申请人
发明人
分类号
C23C16/458;H01L21/205;H01L21/683
主分类号
C23C16/458
代理机构
代理人
主权项
地址
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