MANUFACTURING METHOD OF AN ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY

摘要

PURPOSE: An array substrate production method for liquid crystal display device is provided to simplify a etching process by uniformly etching a copper alloy metal wire without the contamination or the damage of metal film during the etching process. CONSTITUTION: A gate line(4) and a gate electrode(11a) are formed on a substrate(1) as a copper-zinc alloy layer or a copper-titanium alloy layer. A data line(5), a source electrode(12a) and a drain electrode(12b) are formed as the copper-titanium alloy layer. An etching solution composite for the etching of each alloy layer uses 'a etching solution with 5.0-25.0 weight% of peroxide, and 0.01-1.0 weight% of fluorine containing compound and 0.1-5.0 weight% of azole compound and remaining amount of water per total compound weight'.