MANUFACTURING METHOD OF AN ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY

摘要

PURPOSE: A manufacturing method of array panel for liquid crystal display is provided to prevent contamination and damage of metal layer during the etching process. CONSTITUTION: A gate electrode and a gate wire are formed after forming silver thin film and copper film on the substrate. A gate dielectric layer is formed on the front of the substrate. An active layer and ohmic contact layer are provided to pattern after laminating pure amorphous silicon layer and impure amorphous silicon layer on the gate insulating layer. A data line, source and drain electrodes are formed after forming silver thin film and cooper film on the top of the substrate.