发明名称 |
Dielectric thin film-forming composition, method of forming dielectric thin film and dielectric thin film formed by the method |
摘要 |
<p>A liquid composition is provided for forming a thin film in the form of a mixed composite metal oxide in which a composite oxide B containing copper (Cu) and a composite oxide C containing manganese (Mn) are mixed into a composite metal oxide A represented with the general formula: Ba 1-x Sr x Ti y O 3 , wherein the molar ratio B/A of the composite oxide B to the composite metal oxide A is within the range of 0.002 < B/A< 0.05, and the molar ratio C/A of the composite oxide C to the composite metal oxide A is within the range of 0.002 < C/A < 0.03.</p> |
申请公布号 |
EP2608219(A1) |
申请公布日期 |
2013.06.26 |
申请号 |
EP20110306708 |
申请日期 |
2011.12.20 |
申请人 |
MITSUBISHI MATERIALS CORPORATION;STMICROELECTRONICS (TOURS) SAS |
发明人 |
WATANABE, TOSHIAKI;SAKURAI, HIDEAKI;SOYAMA, NOBUYUKI;GUEGAN, GUILLAUME |
分类号 |
H01B3/10 |
主分类号 |
H01B3/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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