MANUFACTURING METHOD OF AN ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY

摘要

PURPOSE: A method for manufacturing an array substrate for a liquid crystal display device is provided to minimize the amount of per acetic acid in an etchant composition and prevent overheating due to chain decomposition reaction by excluding hydrogen peroxide within the etchant composition. CONSTITUTION: After a gate electrode is formed on a substrate, a gate insulating layer is formed on the substrate. After a semiconductor layer is formed on the gate insulating layer, a source/drain electrode is formed on the semiconductor layer. A pixel electrode is formed. The gate electrode and the source/drain electrode are formed by etching a copper metal layer. An etchant composition includes per acetic acid 1 to 10 weight %, a fluorine containing compound 0.01 to 2 weight %, a water-soluble cyclic amine compound 0.01 to 5.0 weight %, and water.