发明名称 WAFER PROCESSING TAPE AND METHOD OF PRODUCING THE SAME
摘要 PURPOSE: A tape for processing a wafer and a manufacturing method thereof are provided to prevent an adhesive layer from being stripped from the adhesive layer of an adhesive tape. CONSTITUTION: An adhesive layer(3) is partly formed on a stripping film. The adhesive layer is divided into a junction reserved region(30) and a peripheral part(32) outside the junction reserved region. A pressure part(20) is formed on a starting point part(34) of the peripheral part and the other region(36). At least three pressure parts are formed from a lateral part to a central part of the adhesive layer. The pressure part is formed by pressing the peripheral part of the adhesive layer.
申请公布号 KR20130069491(A) 申请公布日期 2013.06.26
申请号 KR20120146130 申请日期 2012.12.14
申请人 FURUKAWA ELECTRIC CO., LTD. 发明人 TATEBE KAZUKI
分类号 H01L21/301 主分类号 H01L21/301
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