发明名称 |
WAFER PROCESSING TAPE AND METHOD OF PRODUCING THE SAME |
摘要 |
PURPOSE: A tape for processing a wafer and a manufacturing method thereof are provided to prevent an adhesive layer from being stripped from the adhesive layer of an adhesive tape. CONSTITUTION: An adhesive layer(3) is partly formed on a stripping film. The adhesive layer is divided into a junction reserved region(30) and a peripheral part(32) outside the junction reserved region. A pressure part(20) is formed on a starting point part(34) of the peripheral part and the other region(36). At least three pressure parts are formed from a lateral part to a central part of the adhesive layer. The pressure part is formed by pressing the peripheral part of the adhesive layer.
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申请公布号 |
KR20130069491(A) |
申请公布日期 |
2013.06.26 |
申请号 |
KR20120146130 |
申请日期 |
2012.12.14 |
申请人 |
FURUKAWA ELECTRIC CO., LTD. |
发明人 |
TATEBE KAZUKI |
分类号 |
H01L21/301 |
主分类号 |
H01L21/301 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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