| 摘要 |
PURPOSE: A method of monitoring electric charge quantity accumulated on a substrate is provided to prevent problems due to over-accumulation of charges in advance by monitoring the electric charge quantity accumulated on the surface of the substrate. CONSTITUTION: A work processing part(10) processes a work for a substrate(W). The work processing part includes a process chamber(11), an upper electrode(12), a lower electrode(13), and a power supply(14). An electric charge quantity monitoring part(20) monitors electric charge quantity accumulated on the surface of the substrate. The electric charge quantity monitoring part includes an antenna(21), a measuring part(22), and a calculation part(23). The measuring part applies a frequency in a preset band to the antenna. [Reference numerals] (14) Power supply; (22) Measuring part; (23) Calculation part
|
