| 摘要 |
PURPOSE: A wafer ceramic chuck is provided to prevent the contamination of a wafer by preventing normal particles and metal particles from being attached to the wafer. CONSTITUTION: A main body has a mounting part on the upper side and a pocket on the bottom side. A support pin(120) supports a wafer. A supporting protrusion(130) is formed around the center of the mounting part. A vacuum hole(140) supplies vacuum to the mounting part. |
