PURPOSE: A plasma brush is provided to comprise a nozzle formed with a rectangular or elliptical outlet having a longer horizontal length than a vertical length, and to comprise a filler nozzle formed with pores which are inserted into the outlet of the nozzle and arranged in a rectangular or elliptical shape as same as the outlet. CONSTITUTION: A plasma brush comprises: a connector; a nozzle (20) connected to the connector; a power electrode (30) formed in one side of the nozzle; and a ground electrode (40) formed in the other side of the nozzle facing the connector. The nozzle has an outlet formed in a rectangular or elliptical shape whose horizontal length is longer than the vertical length. The power electrode and the ground electrode comprise a first metal ring and a second metal ring surrounding the outer periphery of the nozzle respectively. The nozzle comprises a dielectric. The connector comprises a pipe having channel holes which flows the gas.
申请公布号
KR20130069064(A)
申请公布日期
2013.06.26
申请号
KR20110136594
申请日期
2011.12.16
申请人
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
发明人
KIM, YARK YEON;YU, HAN YOUNG;YUN, YONG JU;JANG, WON ICK;JEONG, EUN JU;HAN, CHANG HO