SUPPORTING DEVICE FOR MANUFACTURING SILICON CARBIDE SUCEPTOR

摘要

PURPOSE: A supporting device for is provided to form a rotation supporting groove which is not coated with SiC for preventing SiC cracks on a contact position of a graphite susceptor and a supporting device, and to improve thickness uniformity of a SiC layer. CONSTITUTION: A rotation supporting unit is fixed at the bottom of a deposition furnace. An end of a body(20) is rotatably supported by the rotation supporting unit. A fixing tip(21) is provided at the other end of the body The fixing tip is coupled to a rotation supporting groove which is provided at the back of a graphite susceptor to fix the graphite susceptor at the body.