| 摘要 |
<p>PURPOSE: A device and method for coating a substrate are provided to improve the quality of a product by completely removing am edge bead of a base while simultaneously performing a coating work. CONSTITUTION: A stage(120) mounts a plate base(110) with a hole processing surface(113). A spray unit(130) coats a base surface with a coating solution from the upper part of the stage. The stage has an intake flow path(121) around boundaries of an outer surface of the base and the hole processing surface. A vacuum unit(140) absorbs and removes an edge bead of the outer surface of the base and the hole processing surface with vacuum. The vacuum unit includes a vacuum pump(141), an intake pipe(143), and a coating solution processing part(145).</p> |
