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发明名称
摘要
申请公布号	JP5218348(B2)	申请公布日期	2013.06.26
申请号	JP20090204139	申请日期	2009.09.03
申请人		发明人
分类号	C30B29/36;C30B19/04;H01L21/208	主分类号	C30B29/36
代理机构		代理人
主权项
地址

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