FLUID SUPPLY APPARATUS AND SYSTEM AND METHOD FOR CLEANING THIN PLATE USING SAME
摘要
<p>A fluid supplying apparatus includes an inner tube having a plurality of holes for distributing a fluid supplied from a supply unit, and an outer tube arranged coaxially or non-coaxially with the inner tube to surround the inner tube and having a plurality of slots for injecting the fluid distributed therein from the holes to the outside. The outer tube substantially has the same length as the inner tube. The fluid supplying apparatus may be used for a thin film cleaning system or method.</p>
申请公布号
EP2606990(A2)
申请公布日期
2013.06.26
申请号
EP20110818401
申请日期
2011.08.17
申请人
LG CHEM, LTD.
发明人
SEO, YOUNG JU;CHUNG, CHAE-HO;CHANG, DO-KI;YEOM, KI-KYO;IM, YE-HOON;KIM, JAE-MIN;MIN, KYOUNG-HOON;PARK, WON CHAN