| 摘要 |
PURPOSE: A substrate supporting unit and substrate processing apparatus using the same are provided to improve process uniformity by rotating a boat during a process. CONSTITUTION: An outer tube(100) has an internal space. An inner tube(200) is placed in the outer tube. A boat(300) is composed of a body(310), multiple insertion grooves(320), and multiple mounting components(330). A heater(500) heats up the internal space of the outer tube. A rotation component(600) rotates the boat. A base(700) supports the inner tube, outer tube, and rotation component.
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