MICROFLUIDIC DEVICE AND METHOD OF MANUFACTURING THE SAME

摘要

PURPOSE: A micro-fluidic device and a manufacturing method thereof are provided to prevent the adherence of a polymer film and a valve sheet as the polymer film having curvature contacting to the valve sheet is spaced from the valve sheet in normal times. CONSTITUTION: A micro-fluidic device(100) comprises a first substrate(110), a second substrate(120), and a polymer film(130). The first substrate includes a micro flow passage(160) in inside and a valve sheet(112) protruded inside the minute flow passage. The second substrate is arranged to be faced the first substrate and includes a cavity(122) corresponding to the valve sheet in inside. The polymer film is arranged between the first and second substrates. The polymer film includes a joining portion(132) joined with the second substrate and a variable unit(134) which shape is varied by the air pressure of the cavity. The variable unit has curvature and is arranged to be spaced from the valve sheet while the air pressure is not provided.