| 摘要 |
PURPOSE: An evaporation source and a vacuum deposition apparatus including the same are provided to improve the productivity, and increase the use efficiency of deposition material and the operating rate of apparatus. CONSTITUTION: An evaporation source includes a crucible(1141), a connection pipe(1143), a pair of depositing material showerheads(1144), and a nozzle unit(1145). The crucible directly and indirectly heats the depositing material to evaporate the depositing material. The connection pipe includes a first induction furnace path, which is extended from the outlet of crucible, and a pair of second induction furnace paths which are branched by being extended from the first induction furnace path. The valve unit controls that the depositing material, which passed through the first induction furnace path, passes through the pair of second induction furnace path. The pair of depositing material showerheads spray the depositing material which passed through the second induction furnace path.
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