FILM FORMING APPARATUS AND FILM FORMING METHOD

摘要

PURPOSE: A film forming apparatus and a film forming method are provided to suppress heat reaction among a plural kind of gases mixed on the surface or around a shower plate. CONSTITUTION: A shower plate (124) has a plate shape with a predetermined thickness. The shower plate has a plurality of gas flow paths (121) and a plurality of gas vents (129). The plurality of gas flow paths is connected to a gas pipe (131) which supplies a plural kind of gases. The plurality of gas vents supplies a gas to a substrate (101) in a chamber (103). A gas outlet (125) is connected to an exhaust device (128) comprising a regulating valve (126) and a vacuum pump (127). [Reference numerals] (AA) P-1 region; (BB) P-2 region