| 摘要 |
PROBLEM TO BE SOLVED: To highly accurately correct scattered X-rays at a high speed by simple preparation and a process operation and to improve the image quality of images obtained by X-ray measurement. SOLUTION: Obtained measurement data are corrected for each pixel using a correction function which is formed beforehand and for which the measurement data and a correction value are made to correspond. For correction, replacement is performed when the correction value is obtained by direct X-ray intensity and the correction value is subtracted from the measurement data when the correction value is obtained by scattered X-ray intensity. COPYRIGHT: (C)2009,JPO&INPIT |
