| 摘要 |
PROBLEM TO BE SOLVED: To provide a self-organized molecular film formed of a fluorene skeleton-bearing compound and useful as e.g. a resist material for EUV (extreme-ultraviolet light). SOLUTION: A substrate is coated with a solution containing 20-60 wt.% of a fluorene skeleton-bearing specific compound (e.g. a compound selected from a 9,9-bis(polyhydroxyaryl)fluorene, a 9,9-bis(hydroxy-methylolaryl)fluorene and a 9,9-bis(carboxyarylalkyl)fluorene). By using such a specific compound, the objective new self-organized molecular film having fluorene skeleton can be formed on the substrate. COPYRIGHT: (C)2009,JPO&INPIT |
