Micro/nano multiaxial inertial motion sensor device

摘要

The sensor has a coupling structure rotating about an axis (Z). The coupling structure operates a transmission of movement respectively between an accelerometer (730) by an excitation mass having a degree of freedom in translation according to an excitation axis in a plane (XY) perpendicular to the axis and a gyroscope (710) by another excitation mass having another degree of freedom in translation according to another excitation axis in the plane, where the excitation masses are different from each other.