发明名称 MICRO-TIP STRUCTURE AND METHOD OF MANUFACTURING THE SAME
摘要 PURPOSE: A microtip structure and a manufacturing method thereof are provided to reduce the number of processes by forming a structure on one substrate in a consistent process. CONSTITUTION: A microtip(150) is formed on a substrate. The microtip has a sharp shape. A conductive layer(200) is formed on the microtip. A protective film(210) is formed on the conductive layer. The conductive layer exposes the conductive layer.
申请公布号 KR20130067681(A) 申请公布日期 2013.06.25
申请号 KR20110134485 申请日期 2011.12.14
申请人 INDUSTRY-ACADEMIC COOPERATION FOUNDATION, DANKOOKUNIVERSITY 发明人 PARK, JAE HYOUNG;LEE, SEUNG KI;KIM, YONG KWEON;HA, JOON GEUN
分类号 H01L21/66;G01R1/073 主分类号 H01L21/66
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