发明名称 |
Multilayered deformable element with reduced memory properties in a MEMS device |
摘要 |
A deformable element for use in microelectromechanical systems comprises a core layer and a protective layer. The protective layer is capable of deterring combinations of undesired chemical components in operational environments with the core layer of the deformable element.
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申请公布号 |
US8472100(B2) |
申请公布日期 |
2013.06.25 |
申请号 |
US20080046598 |
申请日期 |
2008.03.12 |
申请人 |
ODEN PATRICK IAN;HORNBECK LARRY JOSEPH;JACOBS SIMON JOSHUA;TEXAS INSTRUMENTS INCORPORATED |
发明人 |
ODEN PATRICK IAN;HORNBECK LARRY JOSEPH;JACOBS SIMON JOSHUA |
分类号 |
G02B26/08 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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