TEST APPARATUS OF SEMICONDUCTOR DEVICE AND METHOD OF TESTING THE SAME

摘要

PURPOSE: A test device of a semiconductor device and a testing method thereof are provided to increase the integration of the devices by readjusting the gap between the patterns when the gap difference is confirmed. CONSTITUTION: A plurality of patterns(105a,105b) is formed on a semiconductor substrate in parallel. A first wiring(ML1) is connected to the first pattern. A second wiring(ML2) is connected to the second pattern. A third wiring is connected to the third pattern. A measuring circuit senses the first capacitance and the second capacitance. [Reference numerals] (AA,BB) Measuring circuit