发明名称 |
Production scale fabrication method for high resolution AFM tips |
摘要 |
A method of fabricating high resolution atomic force microscopy (AFM) tips including a single semiconductor nanowire grown at an apex of a semiconductor pyramid of each AFM tip is provided. The semiconductor nanowire that is grown has a controllable diameter and a high aspect ratio, without significant tapering from the tip of the semiconductor nanowire to its base. The method includes providing an AFM probe including a semiconductor cantilever having a semiconductor pyramid extending upward from a surface of said semiconductor cantilever. The semiconductor pyramid has an apex. A patterned oxide layer is formed on the AFM probe. The patterned oxide layer has an opening that exposes the apex of the semiconductor pyramid. A single semiconductor nanowire is grown on the exposed apex of the semiconductor pyramid utilizing a non-oxidized Al seed material as a catalyst for nanowire growth.
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申请公布号 |
US8474061(B2) |
申请公布日期 |
2013.06.25 |
申请号 |
US201213608396 |
申请日期 |
2012.09.10 |
申请人 |
COHEN GUY;REUTER MARK C.;WACASER BRENT A.;KHAYYAT MAHA M.;INTERNATIONAL BUSINESS MACHINES CORPORATION;KING ABDULAZIZ CITY FOR SCIENCE AND TECHNOLOGY |
发明人 |
COHEN GUY;REUTER MARK C.;WACASER BRENT A.;KHAYYAT MAHA M. |
分类号 |
G01Q60/38;B82Y40/00 |
主分类号 |
G01Q60/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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