发明名称 Refractive index distribution measuring method and refractive index distribution measuring apparatus
摘要 A method includes measuring a transmitted wavefront of a test object by introducing reference light into the test object arranged in a medium having a refractive index different from a refractive index of the test object, and calculating a refractive index distribution of the test object by using a measurement result of the transmitted wavefront. The measuring step measures a first transmitted wavefront for a first wavelength and a second transmitted wavefront for a second wavelength different from the first wavelength. The calculating step calculates the refractive index distribution of the test object by removing a shape component of the test object utilizing measurement results of the first and the second transmitted wavefront, and a transmitted wavefront of a reference object arranged in the medium for each of the first and second wavelengths. The reference object has the same shape as the test object and a specific refractive index distribution.
申请公布号 US8472014(B2) 申请公布日期 2013.06.25
申请号 US201113511460 申请日期 2011.05.19
申请人 SUGIMOTO TOMOHIRO;CANON KABUSHIKI KAISHA 发明人 SUGIMOTO TOMOHIRO
分类号 G01N21/41;G01B9/00 主分类号 G01N21/41
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