TRANSFER APPARATUS AND METHOD FOR CONTROLLING THE SAME

摘要

PURPOSE: A transferring device and a control method thereof are provided to confirm defects on a substrate by using a microscope integrated with a stamp and to transfer patterns by using the stamp at the same time. CONSTITUTION: A transferring device comprises an eyepiece, an objective lens, a microscope, and a stamp(120). The eyepiece is installed inside a first housing unit. The objective lens is installed in a second housing unit. The microscope has a main tube connecting the eyepiece and the objective lens. The stamp is joined to an opening of the second housing unit, and patterns becoming transferred on the substrate are formed in the stamp. The stamp is joined to the second housing unit to be detachable.