| 摘要 |
An ultrasonic sensor for detecting and/or scanning an object includes a substrate and a piezoelectric sensor unit arranged on or at this substrate and/or connected to this substrate. The rear side of the substrate facing away from the piezoelectric sensor unit has a surface structure including a plurality of elevated portions and recesses, with this surface structure being configured so that a diffuse scattering of ultrasonic waves incident on the rear side from the direction of the sensor unit takes place by it; and/or in that its elevated portions and/or recesses have a mean lateral extent in the range of 0.05 mum to 1 mm, preferably from 0.1 mum to 200 mum, preferably from 0.2 mum to 20 mum, and/or a mean lateral extent which is smaller than or equal to the wavelength of an ultrasonic wave which can be produced by the piezoelectric sensor unit.
|
