MANUFACTURING METHOD OF VIBRATION PIECE, VIBRATION PIECE, VIBRATOR, OSCILLATOR AND ELECTRONIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a vibration piece and the vibration piece capable of reducing variations in frequency of the vibration piece even if the vibration piece is mounted on a package reduced in height, and further to provide a vibrator provided with the vibration piece, an oscillator provided with the vibration piece and an electronic apparatus provided with the vibration piece.

SOLUTION: A manufacturing method of a tuning-fork type crystal vibration piece 100 includes the steps of: forming recesses 105 and 106 on vibration arms 101 and 102; forming weight metal films 107 and 108 having thicknesses less than depths of the recesses 105 and 106 inside the recesses 105 and 106 subsequent to the step of forming the recesses 105 and 106; and removing parts of the weight metal films 107 and 108 subsequent to the step of forming the weight metal films 107 and 108 inside the recesses 105 and 106.

COPYRIGHT: (C)2013,JPO&INPIT