| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a ceramic heater having a high insulation withstand voltage with less variation, and to provide a manufacturing method therefor. <P>SOLUTION: In the manufacturing method of a ceramic heater, including a substrate 1 composed of ceramic, a heating element 4 formed on the substrate 1, and an overcoat layer 5 formed to cover the heating element 4, a carbon-based heating element is used as the heating element 4, and a step for calcining glass having a firing temperature of 400-500°C so as to have a thickness of 40 μm or less is repeated multiple times, thus forming the overcoat layer 5 having a thickness T of 60 μm or more. <P>COPYRIGHT: (C)2013,JPO&INPIT |
