SENSOR CHIP AND PRESSURE SENSOR

摘要

PROBLEM TO BE SOLVED: To provide an inexpensive and small sensor chip capable of reducing leak of isolation fluid.

SOLUTION: A sensor chip 2 that has a diaphragm 21 and detects a pressure applied to the diaphragm 21, includes: a fluid retaining part 22 formed on the sensor chip 2 and containing magnetic material having been magnetized; and a magnetic fluid 4 retained by the fluid retaining part 22 with a magnetic force generating between the magnetic fluid 4 and the fluid retaining part 22.

COPYRIGHT: (C)2013,JPO&INPIT