发明名称 PRODUCTIVITY IMPROVEMENT SYSTEM, PRODUCTIVITY IMPROVEMENT DEVICE, AND PRODUCTIVITY IMPROVEMENT METHOD
摘要 <P>PROBLEM TO BE SOLVED: To enable an optimal power-saving operation without compromising the processing performance of a process device and with category of a processed article taken in consideration. <P>SOLUTION: Plural process devices 5 each have, as operation modes, a standby mode consuming energy sufficient for quickly start the process of a processed article and a sleep mode consuming the lowest possible energy to quick transition to the standby mode. A productivity improvement device 4 includes: a temporal interval measurement part 31 for measuring a temporal interval from the plural process devices each finishing the process of the processed article to starting the next process on the basis of the production plans for the plural process devices; and an operation mode setup part 32 for setting the sleep mode to an applicable process device if the temporal interval measured by the temporal interval measurement part exceeds predetermined reference time, or otherwise setting the standby mode to the applicable process device. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013125839(A) 申请公布日期 2013.06.24
申请号 JP20110273436 申请日期 2011.12.14
申请人 TOKYO ELECTRON LTD 发明人 MIZUTANI TAKU;NAMIOKA ICHIRO;IIJIMA TOSHIHIKO;TODATE SHIGENORI
分类号 H01L21/02;G05B19/418 主分类号 H01L21/02
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