| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a probe cleaning device for efficiently and equally removing attachment accumulated at probe tips for a plurality of probes arranged in a probe holder. <P>SOLUTION: A control device 3 measures a plurality of coordinates in a probe mounting surface 12a of a probe holder 12 by a measuring instrument 24 installed on a stage mounting surface 23a (reference surface) of a table 23, calculates inclinations in X and Y directions of the probe mounting surface 12a with respect to the reference surface on the basis of the plurality of coordinates, and corrects the inclinations by rotation X-axis drive means 15 and rotation Y-axis drive means 16. Then, the control device calculates a relative position between a probe tip face 11a and a cleaning sheet 21 after correcting the inclination of the stage 22 with respect to the reference surface, and sets a reference pressing amount of a probe 11. This can make a pressing amount of the plurality of probes 11 to the cleaning sheet 21 constant, and can usually perform cleaning on the same condition even in the case of exchanging the probe holders 12. <P>COPYRIGHT: (C)2013,JPO&INPIT |
