| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure device achieving space saving in a horizontal direction at low costs, capable of using even an exposure mask having no flexibility, and capable of reducing a risk in which the exposure mask contacts an exposure object. <P>SOLUTION: The exposure device comprises: a roller that conveys the exposure object and supports an exposure portion of the exposure object; and a downstream side receiving part that receives the exposure object conveyed from the roller. The downstream side receiving part is arranged so that the exposure object conveyed from the roller to the downstream side receiving part is extended in a direction separated from the exposure mask toward a roller side when viewed from a shaft direction of the roller, and at least a portion of a mask holding part is arranged in a space formed between the exposure mask and the exposure object, extending from the roller to the downstream side receiving part, to hold the exposure mask from an exposure object side. <P>COPYRIGHT: (C)2013,JPO&INPIT |
