发明名称 A TECHNIQUE FOR INCREASING ADHESION OF METALLIZATION LAYERS BY PROVIDING DUMMY VIAS
摘要 The process comprises determining a region of reduced contact hole density in a metallic layer of a semiconductor element, forming a position-holding contact through guide (213) in this region and forming a metal region on the determined region that is connected to the through guide. Independent claims are also included for the following: (A) an additional process as above; and (B) a semiconductor component formed as above
申请公布号 KR101278279(B1) 申请公布日期 2013.06.24
申请号 KR20087016007 申请日期 2006.11.15
申请人 发明人
分类号 H01L21/768 主分类号 H01L21/768
代理机构 代理人
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