CHARGED PARTICLE BEAM DRAWING DEVICE, AND ARTICLE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a technique advantageous for reducing a scale of a circuit for correcting drawing data.

SOLUTION: A charged particle beam drawing device for drawing a substrate with a charged particle beam comprises: a division section for dividing drawing data for controlling drawing of the substrate into first drawing data for controlling drawing in a first region of the substrate and second drawing data for controlling drawing in a second region of the substrate; a first correction section for creating first correction drawing data by applying first correction to the first drawing data so that a target pattern is drawn in the first region; a second correction section for generating second correction drawing data by applying second correction different from the first correction to the second drawing data so that a target pattern is drawn in the second region; and a synthetic section for creating synthetic drawing data by synthesizing the first correction drawing data and the second correction drawing data. The substrate is drawn according to the synthetic drawing data.

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