PHOTO-MASKAND METHOD OF FABRICATING COLOR FILTER USING THEREOF

摘要

PURPOSE: An optical mask and a color filter layer forming method using the same are provided to transmit light through the openings and the slits by generating a constructive interference. CONSTITUTION: An optical mask(280) consists of openings(282) and a plurality of slits(286). Light is transmitted through the openings. The slits are spaced apart from the openings and are arranged along the longitudinal direction of the openings. Light is diffracted by the slits. The slits are rectangular. A color filter layer forming method includes the following steps of: preparing a substrate; laminating a color resist layer on the substrate; positioning an optical mask on the substrate, and irradiating the optical mask with light; and removing a part of the color resist layer using development liquid. [Reference numerals] (AA) Opening area; (BB) Dummy area; (CC) Slit area