| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a physical quantity sensor achieving at least one of high sensitivity, improvement of manufacturing efficiency, cost reduction and high reliability, a method for manufacturing the physical quantity sensor, and an electronic apparatus including the physical quantity sensor. <P>SOLUTION: A physical quantity sensor 1 includes: an insulating substrate 2; a movable part 33; a movable electrode part 36 arranged on the movable part 33; a fixed electrode part 38 arranged on the insulating substrate 2 opposite the movable electrode part 36; a cover member 5 joined to the insulating substrate 2 and forming a space for housing the movable part 33, the movable electrode part 36 and the fixed electrode part 38 between the cover member itself and the insulating substrate 2; terminals 44 to 46 formed on the insulating substrate 2 on the outside of the cover member 5; wires 41 to 43 formed on the insulating substrate 2 to electrically connect the movable electrode part 36 or the fixed electrode part 38 to the terminals 44 to 46; and electrodes 71 to 73 formed on the insulating electrode 2 on the outside of the cover member 5 to electrically connect the wires 41 to 44. <P>COPYRIGHT: (C)2013,JPO&INPIT |
