| 摘要 |
PURPOSE: A cooling system of a plasma apparatus is provided to minimize flexure by minimizing thermal shock. CONSTITUTION: An anode unit(110) separates a plurality of anode plates having positive pole with a constant distance. A cathode unit(120) arranges a plurality of cathode plates having negative pole in between the separated gap between the anode unit. A plurality of guide roller units(130) is arranged in both ends of the anode and cathode units and guides conveyance of a product between the gap of the anode unit and the cathode unit. A cooling unit is installed in a plurality of the guide roller units and cools a product conveyed by a plurality of the guide roller units. |
