| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate positioning device capable of performing highly accurate substrate positioning while limiting up-sizing as much as possible. <P>SOLUTION: A substrate positioning device 100 positioning a planar substrate 1 while correcting the position includes a substrate mounting stage 5 having small air holes 16 at least floating the substrate 1 and a piping route 21, and a hole 5a formed in the center, and an XYZθ stage 80 having an XYZθ table 8 placed in the hole 5a of the substrate mounting stage 5, a Z-axis stage 14 for vertically moving the XYZθ table 8 in a direction perpendicular to the plane of the substrate being mounted, and a θ stage 11 for rotating the XYZθ table 8 around a rotational axis perpendicular to the plane of the substrate 1 being mounted. <P>COPYRIGHT: (C)2013,JPO&INPIT |
