摘要 |
<P>PROBLEM TO BE SOLVED: To provide a hydrogen gas detection element in which optical characteristics are changed when exposed under a hydrogen gas containing atmosphere. <P>SOLUTION: A nickel-oxide layer 2 containing nickel trioxide (Ni<SB POS="POST">2</SB>O<SB POS="POST">3</SB>) as a main component is deposited on a transparent substrate 1 of quartz or the like through which light of a visible light domain is transmitted, according to evaporation such as pulse laser evaporation, and a catalyst metal layer 3 comprised of platinum (Pt), palladium (Pd) or an alloy thereof is further deposited on the nickel-oxide layer 2. It is not necessary to use heat for a hydrogen gas detection element manufacturing process or for hydrogen gas detection. <P>COPYRIGHT: (C)2013,JPO&INPIT |