| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a silicon purifying method which can enhance safety, when a pressure reduction vessel is opened. <P>SOLUTION: The silicon purifying method includes a step in which a silicon raw material is purified in a crucible mounted in the pressure reduction vessel, a step in which a purified silicon is taken out from the pressure reduction vessel, a step in which at least one of water vapor and atmospheric air is introduced into the pressure reduction vessel after taking out the purified silicon, and a step in which the condition in the reduced vessel is retained after the step in which at least one of water vapor and atmospheric air is introduced into the pressure reduction vessel. Furthermore, in this silicon purifying method, after the step in which the condition in the pressure reduction vessel is retained, the method includes a step of evacuating the inside of the pressure reduction vessel, a step in which the inner pressure of the pressure reduction vessel is returned into atmospheric pressure, and a step in which the reduced vessel is opened. <P>COPYRIGHT: (C)2013,JPO&INPIT |
