发明名称 LOAD PORT APPARATUS
摘要 Provided is a load port apparatus having a structure capable of resisting against a moment generated at a time of driving of a door increased in weight owing to upsizing. A pair of rectangular main bases, which project perpendicularly to an attachment surface of the load port apparatus and elongated parallel to the attachment surface, are coupled to each other with a coupling shaft, and the structural body including those components is fixed to the attachment surface through intermediation of I-shaped plates capable of being held in close surface contact with the attachment surface. Mechanisms of a door drive mechanism, a placing table, and the like are arranged on an inner side between the pair of main bases of the structural body.
申请公布号 KR101277031(B1) 申请公布日期 2013.06.24
申请号 KR20110086947 申请日期 2011.08.30
申请人 发明人
分类号 H01L21/02;H01L21/67;H01L21/68 主分类号 H01L21/02
代理机构 代理人
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